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      OHB Purge(OHBP)
      With the OHT track system, it provides air bulk storage space for photomask pods, enhancing the space utilization rate in the wafer fab and maximizing the transport efficiency of wafer carriers between processes. The purge unit is installed through the purge pipeline layout, filling pure gas to ensure the micro-environment within the photomask pod and improving yield.

      Optional configuration: Storage position: 1 cell, 2 cells, 3 cells, 4 cells
      Feature Highlights:

      Combined type with row frame

      Integrated control of the entire Bay

      Independently control of specific Shelf

      Power-off sustainable Purge

      Purging only when materials are present

      Idle Purge

      Software Description
      OHBP Software
      OHBP Software
      The OHBP control system cleans and purges the ports of the entire bay, offering two modes: continuous purge and inductive purge. It can be equipped with RFID sensors and temperature/humidity sensors, recording the number of Foup placements and tracking temperature/humidity changes throughout the purge process. In case of abnormal RFID readings or substandard temperature/humidity, it provides real-time alarm functionality;

      The Web UI interface allows for manual adjustment of the proportional valve, real-time control of airflow, adjustment of temperature, humidity, flow, and pressure monitoring ranges, and manual control of the solenoid valve's switch.

      Feature Highlights:
      ▪ Multi-disk real-time monitoring, ensuring stability and reliability.
      ▪ With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status.
      ▪ Recipe management is supported.
      Important Parameters


      Technical IndicatorsParameters
      Flow Spec0~50L/Min
      Humidity RH < 10% Purge duration depending on flow

      Inlet Pressure

      Accuracy ±1.5%, Range 60SLM

      Outlet Pressure

      Accuracy ± 0.5%

      Filtration Precision

      0.003um

      RFID Read Success Rate

      >99.99%

      Position Sensor

      2 Pcs


      Supporting Products
      BACK
      OHBP Software
      Product Function
      The OHBP control system cleans and purges the ports of the entire bay, offering two modes: continuous purge and inductive purge. It can be equipped with RFID sensors and temperature/humidity sensors, recording the number of Foup placements and tracking temperature/humidity changes throughout the purge process. In case of abnormal RFID readings or substandard temperature/humidity, it provides real-time alarm functionality;

      The Web UI interface allows for manual adjustment of the proportional valve, real-time control of airflow, adjustment of temperature, humidity, flow, and pressure monitoring ranges, and manual control of the solenoid valve's switch.

      Feature Highlights:
      ▪ Multi-disk real-time monitoring, ensuring stability and reliability.
      ▪ With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status.
      ▪ Recipe management is supported.
      Feature Highlights：

      Multi-disk real-time monitoring, ensuring stability and reliability

      With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status

      Recipe management is supported